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OEM

Model

Function

Description

ADE 350 351 Wafer Inspection, Wafer Transfer ADE Robot for 9300/9600
維俢、交換

ADE 9300,9600,9650 Parts Wafer Inspection ADE spare Parts:
-ASC CONTROLLER *1
-HIERS RES. STATION 9300/7200 *1
-350 Rob

Irvine Optical-Brooks Ultrasort 408 Wafer Sorter Tested. come with manual.
8"晶圓分類機
4 cassette stations.
pre-aligner.

Akrion GAMA wafer reclaim cleaning 晶圓清洗機 configured for 8" wafer.
de-installed by Akrion in March 2013, parked in the st

AMAT Endura 5500 PVD ·Wafer Size: 200mm Endura
·Cleanroom Interface: Endura HP Front Panel

Veeco E400 MOCVD Vintage:1999*1, 2000*1
Stored in clean room.

Aixtron Thomas Swan TS 19 MOCVD 19 * 2"
Status：Working Condition, in class10000 clean room.
Vintage：2005*1

ASML 100D stepper -

ASML 100C Stepper -

ACCRETECH (TSK) A-WD-5000A Dicing saw -

Tektronix 370A Curve Tracer -

Agilent (HP) 3458A multimeter 8.5位數及10 nV DC解析度
8-ppm 1年的dcV準確度，4-ppm選項
0.05 ppm

KLA-Tencor Constellation AWIS 3100 Wafer Inspection Not tested, incomplete, sold as parts machine, Main frame, Robots are there.

Nikon Optiphot 200 Microscope 金相顯微鏡 5x.10x.20x.50x.100x.
6吋、8吋晶圓檢查

Yaskawa ERCR - CSL22000-RA00 TFT LCD Robot Year 2007, by YASNAC XRC.
As-Is, Where-Is, 現況出售

Brooks ATM-405 Robot 200mm and 300mm wafer robot.
No controller to test the robot, sold As-Is.

FOI Stella Etcher 蚀刻 Brand new 300 mm Etcher
12 吋蝕刻機 (全新)

RION KL 25 Particle Counter 微粒子測試 (液態）

Leica INM 100 Microscope Tested, Fully Operational.

Nikon Optiphot 88 Microscope Vintage:2000
Tested, Fully Operational.
for 8" wafer.
5x, 10x, 20x, 40x, 100x

ALPHA MS-5000A IC memory tester -

Nanofocus microScan AF2000 非接觸式三次元量測儀 3D non-contact surface measurement.
利用二極體雷射進行表面3D量測:

EBARA A150WT pump These 2 pumps are sold as-is, you will need to replace parts before put to work,

Brooks MTR-5 Robotic 自動化機械手臂 was Used in Novellus sysem.

MECS UTX1000PZ Robot spare robot in a WJ-999 system, 6" configured, last work in Dec, 09.
There is n

Rudolph FOCUS FE III (3) Ellipsometer 膜厚量測 in clean room

Agilent 33250A Waveform Generator 80Mhz Function Arbitrary Waveform Generator

Olympus Measuring Microscope Microscope 工具顯微鏡, 量測顯微鏡, 金相顯微鏡

Branchy Vacuum Technology P 200　 ICP ion etcher 蚀刻机　 Inductively Coupled Plasma Reactive Ion Etching
電漿離子蝕刻機

OAI 350 NUV Mask Aligner 曝光機 Currently in use (工作中)。
Mirror 350 440 NM.
Senser 365 400 NM.
6" Wafe

Genmark Robot GB4 wafer handling Robot+Controller+Cables;
Sold "As-Is, Where Is"

Nikon Optiphot 66 microscope 金相顯微鏡 -

DNS CST-SCD 632BP Spin Coater Developer T1:Lithography(Puddle)->rinse->post->bake
T2:HMDS->coating->EBR->pre->back
T3:

Brooks Robot Controller Robot Controller Part No: 600021267SP

Probing Solution Inc. PSI 400 - Eyepiece:10x.or 20x.or30x.
Object: 60x.

Olympus BHT Microscope -

Guide Tech Femto 2000 Time Interval Analyzer (TIA) Can be integrated with Tyradyne and Advantest. Revision 2.3,Win NT4.0,
There ar

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