Novellus Concept I/II Spare Parts

Part Number Part Name
17-103987-00
ALUMINUM RF STRAP
19-00273-00
CONCEPT ll SPRING WASHER
20-00212-00
UNC-2B HEX NUT
20-00221-00
ALUMINUM FLAT #8 WASHER
20-00222-00
FLAT WASHER
22-00657-00
PFR O-RING  AS-369
22-00656-00
PFR O-RING  AS-264
19-00056-00
HEATER FEEDTHRU ASSEMBLY
02-111903-00
UPGRADED RF FEETHRU ASSEMBLY
15-00027-02
SCREW, ADJUSTMENT, HEAD, GAS
15-00043-02
GAS PLATE CERAMIC ADJUSTER
15-00229-00
ALUMINUM 1/2-20 HEX NUT
15-00309-01
1.50” (200mm) NOZZLE HANGER
15-00311-00
NICKEL CAP NUT
15-00368-00
NICKEL  #10 WASHER
15-00341-00
NICKEL HEX HEAD SCREW
15-00371-00
NICKEL 1/4-20 or 1/4-28 HEX NUT
15-00372-00
NICKEL 1/4" FLAT WASHER
15-00385-00
NICKEL 10-32 HEX NUT
15-00386-00
NICKEL #10 WASHER W/FLAT
15-00398-00
HEATER SUPPORT SCREW
15-00399-02
TOP SPINDLE SCREW
15-00399-03
TOP SPINDLE SCREW
15-00399-04
TOP SPINDLE SCREW
15-00399-05
TOP SPINDLE SCREW
15-00401-00
SEQUEL SPINDLE SHAFT
15-00409-00
PYREX & Quartz WINDOW
15-00457-00
HEATER STRAP SCREW
15-00475-00 REV. D
CERAMIC GAS FEEDTHRU INSULATOR
15-00558-01
15-00558-02
CERAMIC HEATER  LEAD SLEEVE
15-00567-00
CERAMIC 1/8"ID TC TUBE
15-00578-00
CERAMIC AC FEEDTHRU FLANGED SLEEVE
15-00654-00
ROTATION ADJUSTMENT CLAMP
15-00684-00 REV. C
CERAMIC TC PIN
15-00685-00
ULTRA TORR 3/8” O-SEAL FEEDTHRU
15-00686-00
FEEDTHRU WASHER
15-00698-00
FORK SCREW
15-00699-01
CERAMIC FORK FINGER
15-00701-00
CONCEPT 1 BOTTOM RETAINER FORK PLATE
15-00700-00
CONCEPT II BOTTOM RETAINER FORK PLATE
:15-00729-00
FLAT CLAMP
15-00730-00
KEYED FLANGE
15-00839-00
NICKEL ¼-20 X .9 LG SCREW
15-103913-02
FEEDTHRU STRAP CLAMP
15-108174-00
SCREW COVER CUP
15-108307-00
RF STRAP CLAMP
17-00094-00
ALUMINUM LF BIAS STRAP
17-00148-00
FORK SPRING
   
 
   
 
   
 
   
 
   
 
   
   
   
 
   
 
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